Our Business

Energy-Filtered Ion Implantation

We’re developing and supplying a highly innovative tool for manufacturing efficient power semiconductor microchips.

Our Energy-Filter has been specially developed for doping new microchips made of silicon carbide (SiC), a material that represents a huge technological leap for wind power, photovoltaics and electromobility. Our technology enables novel designs, reduces costs and increases the performance and yield of microchips.

Learn more

Processing SiC Power Microchips

The Energy-Filter technology revolutionizes the manufacturing of power microchips by eliminating the need for conventional, complex and time-consuming ion implantation processes. Thus enabling faster process time, higher throughput and maintaining accurate doping homogeneity from wafer to wafer.

Your Benefits

Our experience … your benefits

The Energy-Filter technology enables the following for your microchips:

cost reduction

design innovation

performance boost

Management Team

Prof. Dr. Michael Rüb
CEO & Managing Director

M.Eng. Benjamin Tom
CFO & Managing Director

Our Vision

Device

EFII© will be established as enabling technology for superjunction MOS transistors for wind power, photovoltaics, electric vehicles, thus contributing to achieve the climate targets.

Process Technology

EFII© will be established as a standard SiC specific industrial processing technique, like capped annealing gas phase wafer growth.

Implantation Equipment

EFII© will foster the industrial application of high energy ion implantation by allowing simplified equipment.