SiC Superjunction MOSFET

A powerful technology for your powerful SJ-MOSFETs.

SJ-MOSFETs

less than

3%

concentration variation

SiC SJ-MOSFET

A powerful technology
for your powerful devices.

SJ-MOSFETs

less than

3%

concentration variation

How to realize superjunction structures in silicon carbide?

Our Approach

Multiepitaxy with masked EFII© p- and n-implant. The Energy-Filter
Technology enables specialized implantation and undoped epi regrowth.

How to realize superjunction
structures in silicon carbide?

Our Approach

Multiepitaxy with masked EFII© p- and n-implant.
The Energy-Filter Technology enables specialized
implantation and undoped epi regrowth.

Active chip area reduction afforded by
SiC SJ MOSFET relative to conventional
SiC MOSFET is visualized in the graph below.

Active chip area reduction afforded by SiC SJ MOSFET
relative to conventional SiC MOSFET is visualized in the graph below.